ACS253MS
Die Characteristics
DIE DIMENSIONS:
Size: 2390µm x 2390µm (94 mils x 94 mils)
Thickness: 525µm ±25µm (20.6 mils ±1 mil)
Bond Pad: 110µm x 110µm (4.3 mils x 4.3 mils)
METALLIZATION:
Type: Al
Metal 1 Thickness: 0.7µm ±0.1µm
Metal 2 Thickness: 1.0µm ±0.1µm
SUBSTRATE
Silicon on Sapphire (SOS)
SUBSTRATE POTENTIAL:
Unbiased Insulator
BACKSIDE FINISH:
Sapphire
PASSIVATION:
Type: Phosphorous Silicon Glass (PSG)
Thickness: 1.30µm ±0.15µm
SPECIAL INSTRUCTIONS:
Bond VCC First
ADDITIONAL INFORMATION:
Worst Case Density: <2.0 x 105 A/cm2
Transistor Count: 140
Metallization Mask Layout
ACS253MS
S1
10E
VCC
20E
1I 3
S0
1I 2
2I 3
1I 1
2I 2
1T 0
2I 1
1Y
GND
2Y
2I 0
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